XAS:Equipment/Quorum: Q150T ES

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DESCRIPTION

The Q150T ES is a compact turbomolecular-pumped coating system.

FEATURES
Vacuum Gauge Range

1000 - 5x10-4 mbar

Ultimate Vacuum

5x10-5

Target

Diameter: 54 mm
Thickness 0.2 mm

Available Target

Graphite and Chromium

Deposition Current

0 - 150 mA

Deposition Rate

0 - 20 nm/minute

Sputter Time

0 - 10 minutes

Other info here: File:Q150T Manual.pdf

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