Glow Research Auto Glow
Source of Information
You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4
Start
- Turn on the vacuum pump by turning on the power bar and open the valve.
- Press AC ON.
- Switch Selector to RF Set Point.
- Set RF Set Point to zero.
- Switch Selector to Pressure.
- Set timer to 5 min.
- Make sure the chamber is clean. Use ethanol wipes as necessary.
- Place sample in chamber.
- Press Vacuum. You may have to hold the door in place to ensure a proper seal. Make sure the door is well centered, a misaligned door will cause the chamber to leak.
- Ensure the Tuning Auto/Man button is not pressed (light is off).
- Once the pressure falls below 0.5 Torr, press Process Start.
- Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
- Let the pressure go down until 0.85 torr.
- Turn off the gas line.
- Press Process Abort.
- Switch Selector to RF Set Point.
- Adjust the RF Set Point rotating the knob (30W recommended).
- Press Tuning Auto/Man (light turns on).
- Rotate Selector to Pressure.
- Set the timer as desired (30s recommended). Press Process Abort to reset timer.
- Press Process Start, once the pressure reading is below 0.5 Torr. Your process will begin.
- Turn gas line on IMMEDIATELY by flipping GAS 1 toggle switch up; You may press Abort Process if you want to terminate manually.
IMPORTANT: Make sure the pressure stabilizes between 0.8-1.3 Torr during your process. Multiple “beeps” indicate you’re operating outside this range. If pressure is incorrect, immediately abort, and make sure you went through all the steps.
ALSO IMPORTANT: Never, ever rotate any knobs on the black box. System flow rate has been carefully calibrated. Only flipping toggle switches up and down is allowed.
Stop
- Stop gas flow.
- Press Vacuum to vent to atmosphere. Make sure GAS 3 toggle switch is up, as chamber now vents through the black box. You can leave it open at all times.
- Remove sample.
- Make sure the chamber is clean. Use ethanol wipes as necessary.
- Turn off the machine.
- Close the valve.
- Turn off the vacuum pump (power bar).
Having problems with the system? Talk to Jason or Dominique. They will help you for troubleshooting.
|