Godin:Protocols/Glow Research Auto Glow

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Auto Glow Glow Research Auto Glow Operation Procedure Start Turn on the vacuum pump at the pump Press AC ON Insert sample in chamber Place chamber lid Close the door properly (The RF cannot be activated unless the door is closed) Press Vacuum Press Tuning Auto/Man (Light turns on) Set the timer as desired (30 s recommended) Turn on gas flow Press Process Start; the process will begin automatically once the pressure falls below 0.5 Torr. You may press Abort Process if you want to terminate manually Stop Push Vacuum to vent to atmosphere Stop flow Remove sample Turn off the machine Turn off the vacuum pump Calibration Procedure Turn on the vacuum pump at the pump Press AC ON Switch Selector to RF Set Point Set RF to Zero Switch Selector to Pressure Press Vacuum Once the pressure falls to to 0.5 Torr, press Process Start Turn on gas flow by flipping GAS 1 toggle switch up Let the pressure reading stabilize Set the pressure to approximately 1 Torr by adjusting the gas flow. The system can operation in the range of 0.5 to 1.2 Torr Press Process Abort Press Vacuum Close Gas Flow