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#Rawat. (2018). Etching. Slideshare.net. Retrieved 24 February 2018, from https://www.slideshare.net/deepak10rawat/etching-55985755 | #Rawat. (2018). Etching. Slideshare.net. Retrieved 24 February 2018, from https://www.slideshare.net/deepak10rawat/etching-55985755 | ||
#Plasma etching with a microwave cavity plasma disk source. (1989). Vacuum, 39(10), 997. http://dx.doi.org/10.1016/0042-207x(89)90957-3 | #Plasma etching with a microwave cavity plasma disk source. (1989). Vacuum, 39(10), 997. http://dx.doi.org/10.1016/0042-207x(89)90957-3 | ||
#"Dry Etching.” MIT Courses: Electrical and Computer Science (6.152J/3.155J). MIT Open CourseWare. ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/lecture-notes/lecture17.pdf. | |||
#Tanaka, Hiro, et al. “Onset of Wiggling in a Microscopic Patterned Structure Induced by Intrinsic Stress During the Dry Etching Process.” Journal of Applied Mechanics, vol. 81, no. 9, Oct. 2014, p. 091009., doi:10.1115/1.4027914. | |||
#Etching Processes, MEMSnet.org. Retrieved 12 April 2018, from http://www.freepatentsonline.com/5501893.html | |||
#“BYU Cleanroom.” STS Multiplex ICP Etch | BYU Cleanroom, cleanroom.byu.edu/sts_icp. | |||
#Roozeboom, F., et al. “Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching.” ECS Journal of Solid State Science and Technology, vol. 4, no. 6, July 2015, doi:10.1149/2.0111506jss. | |||
