Microfluidics Facility Adventures
Materials to Bring
- Wafers
- Masks
- Photoresist if its not already there
- Developer
- A positive outlook on life
Things to check when you get there
- There is isopropanol
- There is Acetone
- The waste isn't full
Safety Things
- Safety glasses
- Gloves
- Booties
- Lab coat
- Hairnet
- Dispose of things correctly in the right containers
- Check the hood is working
General Protocol
Spinning
- Check everything is working in the vacuum chuck with random wafer
- Turn on vacuum
- Aluminum foil everything
- Put on wafer, pour on photoresist
- Check spin parameters
- Today I did 500 rpm, ramp of 5, dwell of 10 then 1900 rpm, ramp of 5, dwell of 30.
- Next time should go longer on the 1900 rpm spin to get the resist more even, though 1900 is pretty good rpm, maybe even a little slower like 1800 since I got around 42 μm today.
Soft Bake
- 3 mins 65°C
- 5 mins 95°C
- Follow the data sheet directions
Masks and UV
- Glass plate with mask inkside facing down to the wafer
- Turn on vacuum, flip the switch on the left on the table that engages vacuum
- Adjust Z-direction so that it is touching
- Set exposure
- Used 25 seconds today seemed to work fine
- Press the rotate button thingy on the right
Hard Bake
- 3 mins 65°C
- 8 mins 95°C
- Follow the data sheet directions
Develop
- Developer
- Air-dry
- Don't isopropanol wash
Hard Bake
- 30 mins at 160 °C
Check height
- Use machine
- Remember to move up z before resetting it
Clean everything
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Project name
Main project page
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